Issued Patents All Time
Showing 26–50 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10364506 | Electroplating apparatus with current crowding adapted contact ring seal and thief electrode | Paul R. McHugh | 2019-07-30 |
| 10240248 | Adaptive electric field shielding in an electroplating processor using agitator geometry and motion control | Paul Van Valkenburg, Robert Mikkola, John L. Klocke, Paul R. McHugh, Kyle M. Hanson +1 more | 2019-03-26 |
| 10232413 | Controlled fluid flow for cleaning an optical element | Silvia De Dea, Chunguang Xia, Brandon Wilson Verhoff | 2019-03-19 |
| 10227707 | Inert anode electroplating processor and replenisher | Paul R. McHugh, John L. Klocke | 2019-03-12 |
| 10227706 | Electroplating apparatus with electrolyte agitation | Paul R. McHugh | 2019-03-12 |
| 10191379 | Removing photoresist from a wafer | Paul R. McHugh, Kyle M. Hanson, John L. Klocke, Eric J. Bergman, Stuart Crane | 2019-01-29 |
| 10113245 | Electroplating contact ring with radially offset contact fingers | — | 2018-10-30 |
| 10087543 | Seal rings in electrochemical processors | Nolan L. Zimmerman, George Mattinger, Eric A. Englhardt, Balamurugan Ramasamy | 2018-10-02 |
| 10081881 | Electroplating apparatus with membrane tube shield | Paul R. McHugh, Roey Shaviv | 2018-09-25 |
| 10047453 | Electroplating apparatus | Daniel J. Woodruff, Paul R. McHugh | 2018-08-14 |
| 10008729 | High performance flow battery | Joseph G. Gordon, II, Alan J. Gotcher, Godfrey Sikha | 2018-06-26 |
| 9994376 | Package comprising a plurality of individually wrapped articles | Widalys Luz De Soto-Burt, Charlotte Fausett | 2018-06-12 |
| 9958782 | Apparatus for post exposure bake | Kyle M. Hanson, Viachslav Babayan | 2018-05-01 |
| 9920448 | Inert anode electroplating processor and replenisher with anionic membranes | Paul R. McHugh | 2018-03-20 |
| 9776218 | Controlled fluid flow for cleaning an optical element | Silvia De Dea, Chunguang Xia, Brandon Wilson Verhoff | 2017-10-03 |
| 9765443 | Electroplating processor with current thief electrode | Paul R. McHugh | 2017-09-19 |
| 9758897 | Electroplating apparatus with notch adapted contact ring seal and thief electrode | Paul R. McHugh | 2017-09-12 |
| 9689082 | Electroplating wafers having a notch | Paul R. McHugh | 2017-06-27 |
| 9557650 | Transport system for an extreme ultraviolet light source | Silvia De Dea, Alexander I. Ershov, Brandon Wilson Verhoff, Bruno La Fontaine | 2017-01-31 |
| 9560730 | Transport system for an extreme ultraviolet light source | Silvia De Dea, Alexander I. Ershov, Brandon Wilson Verhoff, Bruno La Fontaine | 2017-01-31 |
| 9469911 | Electroplating apparatus with membrane tube shield | Paul R. McHugh, Roey Shaviv | 2016-10-18 |
| 9245767 | Anneal module for semiconductor wafers | Vincent Steffan Francischetti, Kyle M. Hanson, Paul Z. Wirth, Robert B. Moore | 2016-01-26 |
| 9222195 | Electroplating systems and methods for high sheet resistance substrates | Paul R. McHugh | 2015-12-29 |
| 9160025 | Flow battery systems | Kyle M. Hanson | 2015-10-13 |
| 9120609 | Wrapper for personal care article | Widalys Luz De Soto-Burt | 2015-09-01 |