Issued Patents All Time
Showing 76–99 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7267749 | Workpiece processor having processing chamber with improved processing fluid flow | Paul R. McHugh, Kyle M. Hanson | 2007-09-11 |
| 7264698 | Apparatus and methods for electrochemical processing of microelectronic workpieces | Kyle M. Hanson, Thomas Ritzdorf, Paul R. McHugh | 2007-09-04 |
| 7252714 | Apparatus and method for thermally controlled processing of microelectronic workpieces | Kyle M. Hanson, Robert W. Batz, Jr., Rajesh Baskaran, Nolan L. Zimmerman, Zhongmin Hu +1 more | 2007-08-07 |
| 7247223 | Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces | Paul R. McHugh, Kyle M. Hanson | 2007-07-24 |
| 7189318 | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece | Paul R. McHugh, Robert A. Weaver, Thomas Ritzdorf | 2007-03-13 |
| 7161689 | Apparatus and method for processing a microelectronic workpiece using metrology | Thomas Ritzdorf, Steve Eudy, Paul R. McHugh | 2007-01-09 |
| 7160421 | Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece | Paul R. McHugh, Robert A. Weaver, Thomas Ritzdorf | 2007-01-09 |
| 7115196 | Apparatus and method for electrochemically depositing metal on a semiconductor workpiece | Linlin Chen, Paul R. McHugh, Robert A. Weaver, Thomas Ritzdorf | 2006-10-03 |
| 7102763 | Methods and apparatus for processing microelectronic workpieces using metrology | Thomas Ritzdorf, Steve Eudy, Paul R. McHugh, Robert A. Weaver, Brian Aegerter +2 more | 2006-09-05 |
| 7020537 | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece | Paul R. McHugh, Robert A. Weaver, Thomas Ritzdorf | 2006-03-28 |
| 6962649 | Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces | John M. Pedersen, Steve Eudy | 2005-11-08 |
| 6921467 | Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces | Kyle M. Hanson, Steve Eudy, Thomas Ritzdorf, Daniel J. Woodruff, Randy Harris +4 more | 2005-07-26 |
| 6861027 | Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature | Robert A. Weaver, Paul R. McHugh | 2005-03-01 |
| 6851441 | Apparatus for collecting rainwater | — | 2005-02-08 |
| 6782645 | Safety guard and deactivation device | Ernest J. Hickle | 2004-08-31 |
| 6780374 | Method and apparatus for processing a microelectronic workpiece at an elevated temperature | Robert A. Weaver, Paul R. McHugh | 2004-08-24 |
| 6747734 | Apparatus and method for processing a microelectronic workpiece using metrology | Thomas Ritzdorf, Steve Eudy, Paul R. McHugh | 2004-06-08 |
| 6660137 | System for electrochemically processing a workpiece | Paul R. McHugh, Kyle M. Hanson | 2003-12-09 |
| 6569297 | Workpiece processor having processing chamber with improved processing fluid flow | Paul R. McHugh, Kyle M. Hanson | 2003-05-27 |
| 6565729 | Method for electrochemically depositing metal on a semiconductor workpiece | Linlin Chen, Paul R. McHugh, Robert A. Weaver, Thomas Ritzdorf | 2003-05-20 |
| 6471913 | Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature | Robert A. Weaver, Paul R. McHugh | 2002-10-29 |
| 6428673 | Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology | Thomas Ritzdorf, Steve Eudy, Paul R. McHugh | 2002-08-06 |
| 6191388 | Thermal processor and components thereof | Mark P. Cleaver, Paul R. McHugh, Larry J. Funk | 2001-02-20 |
| D344098 | Coin operated cartoon house | — | 1994-02-08 |