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Home › Pedestal heater for spatial multi-wafer processing tool

Pedestal heater for spatial multi-wafer processing tool

US Patent 11430686 · Granted Aug 30, 2022

Estimated economic value: $41,861,000 ⓘ

Assignee

Applied Materials

Inventors

Tejas Ulavi (24 patents)
Sanjeev Baluja (104 patents)
Dhritiman Subha Kashyap (21 patents)

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