Issued Patents All Time
Showing 26–50 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11550064 | Apparatus, system and method for providing global localization output and application of same | Hairuo Zhuang, Venkatesan Nallampatti Ekambaram, Vignesh Sethuraman | 2023-01-10 |
| 11530482 | Faceplate having a curved surface | Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Juan Carlos Rocha-Alvarez +5 more | 2022-12-20 |
| 11532462 | Method and system for cleaning a process chamber | Kalyanjit Ghosh, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Sanjeev Baluja | 2022-12-20 |
| 11492705 | Isolator apparatus and methods for substrate processing chambers | Nitin Pathak, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2022-11-08 |
| 11443921 | Radio frequency ground system and method | Gaosheng Fu, Tuan Nguyen | 2022-09-13 |
| 11434569 | Ground path systems for providing a shorter and symmetrical ground path | Tuan Nguyen, Jason M. Schaller, Edward P. Hammond, IV, David Blahnik, Tejas Ulavi +3 more | 2022-09-06 |
| 11359657 | Fitting for attachment to a part and associated assembly and method | — | 2022-06-14 |
| 11299805 | Plasma corrision resistive heater for high temperature processing | Abdul Aziz Khaja, Ren-Guan Duan, Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2022-04-12 |
| 11293099 | Showerhead assembly with multiple fluid delivery zones | Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Sam Kim, Tuan Nguyen | 2022-04-05 |
| 11276569 | On stack overlay improvement for 3D NAND | Yongjing Lin, Tza-Jing Gung, Masaki Ogata, Yusheng Zhou, Xinhai Han +3 more | 2022-03-15 |
| 11242600 | High temperature face plate for deposition application | Saket Rathi, Tuan Nguyen | 2022-02-08 |
| 11225992 | Fastening system and methods for use | Chanseyha Eng | 2022-01-18 |
| 11139168 | Chamber deposition and etch process | Jun Ma, Tuan Nguyen | 2021-10-05 |
| 11136665 | Shadow ring for modifying wafer edge and bevel deposition | Dale Du Bois, Mohamad A. Ayoub, Robert W. Kim, Mark Fodor, Binh Nguyen +6 more | 2021-10-05 |
| 11107704 | Gas input system for a substrate processing chamber | Tejas Ulavi, Thuy Britcher | 2021-08-31 |
| 11078568 | Pumping apparatus and method for substrate processing chambers | Kalyanjit Ghosh, David Blahnik, Tuan Nguyen | 2021-08-03 |
| 11080617 | Preservation of causal information for machine learning | Thomas Rosati, Tittu Thomas Nellimoottil | 2021-08-03 |
| 11049699 | Gas box for CVD chamber | Tejas Ulavi, Nitin Pathak, Ajit Balakrishna | 2021-06-29 |
| 11004663 | Chamber design for semiconductor processing | Juan Carlos Rocha-Alvarez, Dale R. Du Bois | 2021-05-11 |
| 10930475 | Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films | Prashant Kumar Kulshreshtha, Ziqing Duan, Abdul Aziz Khaja, Zheng John Ye | 2021-02-23 |
| 10910238 | Heater pedestal assembly for wide range temperature control | Kaushik Alayavalli, Ajit Balakrishna, Sanjeev Baluja, Matthew J. Busche, Juan Carlos Rocha-Alvarez +3 more | 2021-02-02 |
| 10910227 | Bottom and side plasma tuning having closed loop control | Juan Carlos Rocha-Alvarez, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan, Mohamad A. Ayoub +1 more | 2021-02-02 |
| 10889894 | Faceplate with embedded heater | Daniel HWUNG, Yuxing Zhang, Kalyanjit Ghosh, Kaushik Alayavalli | 2021-01-12 |
| 10879041 | Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers | Zheng John Ye, Abdul Aziz Khaja, Kwangduk Douglas Lee, Xing Lin, Jianhua Zhou +2 more | 2020-12-29 |
| 10793954 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2020-10-06 |