Issued Patents All Time
Showing 76–83 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711360 | Methods to improve in-film particle performance of amorphous boron-carbon hardmask process in PECVD system | Ziqing Duan, Kwangduk Douglas Lee, Abdul Aziz Khaja, Bok Hoen Kim, Prashant Kumar Kulshreshtha | 2017-07-18 |
| 9593419 | Wafer rotation in a semiconductor chamber | Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan, Robert W. Kim, Dale R. Du Bois +2 more | 2017-03-14 |
| 9581807 | Supply independent and programmable non-resonant MEMS driver | Ravinder Singh, Meng-Tong Tan, Minkyu Je, Tal Langer | 2017-02-28 |
| 9458537 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2016-10-04 |
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Eller Y. Juco, Mohamad A. Ayoub, Hyung Joon Kim, Karthik Janakiraman +11 more | 2016-05-10 |
| 9157730 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2015-10-13 |
| 8793489 | Method and system for controlling data access to organizational data maintained in hierarchical | Roman Polunin, Bogdan Cirlig | 2014-07-29 |
| 8778813 | Confined process volume PECVD chamber | Ramprakash Sankarakrishnan, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Dale R. Du Bois, Mark Fodor +6 more | 2014-07-15 |