Gas mixer to enable RPS purging

Assignee

• Applied Materials

Inventors

• Fang Ruan (10 patents)
• Diwakar Kedlaya (29 patents)
• Amit Kumar BANSAL (84 patents)
• Venkata Sharat Chandra Parimi (21 patents)
• Rajaram Narayanan (4 patents)
• Badri Narayan Ramamurthi (30 patents)
• Sherry L. Mings (3 patents)
• Job George Konnoth Joseph (3 patents)
• Rupankar Choudhury (7 patents)

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