Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249504 | Manufacturing and reuse of semiconductor substrates | Bernhard Goller, Tobias Franz Wolfgang Hoechbauer, Martin Huber, Iris Moder, Matteo Piccin +2 more | 2025-03-11 |
| 11712749 | Parent substrate, wafer composite and methods of manufacturing crystalline substrates and semiconductor devices | Ralf Rieske, Wolfgang Diewald, Bernhard Goller, Heimo Graf, Gerald Lackner +4 more | 2023-08-01 |
| 10347491 | Forming recombination centers in a semiconductor device | Wolfgang Jantscher, Oliver Blank, Petra Fischer, Ravi Keshav Joshi, Kurt Pekoll +5 more | 2019-07-09 |
| 10199255 | Method for providing a planarizable workpiece support, a workpiece planarization arrangement, and a chuck | Ingo Muri, Bernhard Goller, Christian Grindling | 2019-02-05 |
| 9862037 | Method for planarizing one or more workpieces, a workpiece planarization arrangement, a chuck and a replaceable workpiece-support for a chuck | Ingo Muri, Bernhard Goller, Christian Grindling | 2018-01-09 |