| 12211702 |
Solid body and multi-component arrangement |
Wolfram Drescher, Marko Swoboda, Christian Beyer, Jan Richter |
2025-01-28 |
| 12159805 |
Method for producing wafers with modification lines of defined orientation |
Marko Swoboda, Christian Beyer, Jan Richter |
2024-12-03 |
| 12151314 |
Device and method for applying pressure to stress-producing layers for improved guidance of a separation crack |
Marko Swoboda, Christian Beyer, Jan Richter |
2024-11-26 |
| 12107017 |
Method and apparatus for producing at least one modification in a solid body |
Marko Swoboda, Albrecht Ullrich |
2024-10-01 |
| 12030216 |
Method for separating wafers from donor substrates |
Marko Swoboda, Christian Beyer, Albrecht Ullrich, Jan Richter |
2024-07-09 |
| 11869810 |
Method for reducing the thickness of solid-state layers provided with components |
Marko Swoboda, Christian Beyer, Jan Richter |
2024-01-09 |
| 11833617 |
Splitting of a solid using conversion of material |
Jan Richter, Christian Beyer |
2023-12-05 |
| 11822307 |
Laser conditioning of solid bodies using prior knowledge from previous machining steps |
Marko Swoboda, Jan Richter, Franz Schilling |
2023-11-21 |
| 11787083 |
Production facility for separating wafers from donor substrates |
Marko Swoboda, Christian Beyer, Albrecht Ullrich, Jan Richter |
2023-10-17 |
| 11712749 |
Parent substrate, wafer composite and methods of manufacturing crystalline substrates and semiconductor devices |
Alexander Binter, Wolfgang Diewald, Bernhard Goller, Heimo Graf, Gerald Lackner +4 more |
2023-08-01 |
| 11664277 |
Method for thinning solid-body layers provided with components |
Marko Swoboda, Jan Richter |
2023-05-30 |
| 11551981 |
Method and apparatus for producing at least one modification in a solid body |
Marko Swoboda, Albrecht Ullrich |
2023-01-10 |
| 11407066 |
Splitting of a solid using conversion of material |
Jan Richter, Christian Beyer |
2022-08-09 |
| 11309191 |
Method for modifying substrates based on crystal lattice dislocation density |
Christian Beyer, Jan Richter, Marko Swoboda, Albrecht Ullrich |
2022-04-19 |
| 11130200 |
Combined laser treatment of a solid body to be split |
Marko Swoboda, Jan Richter |
2021-09-28 |
| 11059202 |
Method and device for producing planar modifications in solid bodies |
Christian Beyer, Christoph Guenther, Jan Richter, Marko Swoboda |
2021-07-13 |
| 10978311 |
Method for thinning solid body layers provided with components |
Wolfram Drescher, Marko Swoboda, Christian Beyer, Jan Richter |
2021-04-13 |
| 9239042 |
System for monitoring the condition of rotor blades at wind turbines |
Bernd Frankenstein, Bianca Weihnacht, Daniel Fischer |
2016-01-19 |
