Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199255 | Method for providing a planarizable workpiece support, a workpiece planarization arrangement, and a chuck | Ingo Muri, Alexander Binter, Bernhard Goller | 2019-02-05 |
| 9862037 | Method for planarizing one or more workpieces, a workpiece planarization arrangement, a chuck and a replaceable workpiece-support for a chuck | Ingo Muri, Alexander Binter, Bernhard Goller | 2018-01-09 |