Issued Patents All Time
Showing 26–50 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9929028 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2018-03-27 |
| 9873940 | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus | Lin Xu, Hong Shih, Nash W. ANDERSON, Tom Stevenson, John Michael Kerns +1 more | 2018-01-23 |
| 9623449 | Dielectric window cleaning apparatuses | Armen Avoyan, Hong Shih, Cliff LaCroix | 2017-04-18 |
| 9580360 | Monolithic ceramic component of gas delivery system and method of making and use thereof | Iqbal Shareef, Mike Ingamells | 2017-02-28 |
| 9546432 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, John Michael Kerns, William Charles, Sivakami Ramanathan +3 more | 2017-01-17 |
| 9505036 | Portable sonic particle removal tool with a chemically controlled working fluid | Armen Avoyan, Cliff LaCroix, Hong Shih | 2016-11-29 |
| 9502275 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2016-11-22 |
| 9396912 | Methods for mixed acid cleaning of showerhead electrodes | Armen Avoyan, Cliff La Croix, Hong Shih | 2016-07-19 |
| 9387521 | Method of wet cleaning aluminum chamber parts | Hong Shih, Fan-Cheung Sze, Brian McMillin, Yan Fang, Duane Outka +2 more | 2016-07-12 |
| 9337002 | Corrosion resistant aluminum coating on plasma chamber components | Hong Shih, Lin Xu, Anthony Amadio, Robert Griffith O'Neill, Peter Holland +5 more | 2016-05-10 |
| 9314854 | Ductile mode drilling methods for brittle components of plasma processing apparatuses | Lihua Huang, Duane D. Scott, Joseph P. Doench, Jamie Burns, Emily P. Stenta +1 more | 2016-04-19 |
| 9293305 | Mixed acid cleaning assemblies | Armen Avoyan, Cliff La Croix, Hong Shih | 2016-03-22 |
| 9123651 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, John Michael Kerns, William Charles, Sivakami Ramanathan +3 more | 2015-09-01 |
| 9054148 | Method for performing hot water seal on electrostatic chuck | Hong Shih, Tuochuan Huang, David Schaefer, Ambarish Chhatre, MingHang Wu +1 more | 2015-06-09 |
| 8945317 | System and method for cleaning gas injectors | Armen Avoyan, Cliff La Croix, Hong Shih, Allan K. Ronne, Catherine Zhou | 2015-02-03 |
| 8854451 | Automated bubble detection apparatus and method | Josh Cormier, Fangli Hao, Hong Shih, Tuochuan Huang, Allan K. Ronne +1 more | 2014-10-07 |
| 8597428 | Vacuum sealing radio frequency (RF) and low frequency conducting actuator | Danny Brown, Allan K. Ronne, Arthur H. Sato, Leonard J. Sharpless | 2013-12-03 |
| 8585844 | Extending lifetime of yttrium oxide as a plasma chamber material | Hong Shih, Duane Outka, Shenjian Liu | 2013-11-19 |
| 8545639 | Method of cleaning aluminum plasma chamber parts | Hong Shih, Dean J. Larson, Tuochuan Huang, Armen Avoyan, Jeremy Chang +5 more | 2013-10-01 |
| 8486841 | Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof | Robert O'Donnell, Christopher C. Chang | 2013-07-16 |
| 8318035 | Methods of finishing quartz glass surfaces and components made by the methods | Mark Kiehlbauch | 2012-11-27 |
| 8292698 | On-line chamber cleaning using dry ice blasting | Hong Shih, Oana M. Leonte, Tuochuan Huang, Gregory J. Goldspring, Michael C. May | 2012-10-23 |
| 8097105 | Extending lifetime of yttrium oxide as a plasma chamber material | Hong Shih, Duane Outka, Shenjian Liu | 2012-01-17 |
| 8022718 | Method for inspecting electrostatic chucks with Kelvin probe analysis | Armen Avoyan, Hong Shih | 2011-09-20 |
| 7685965 | Apparatus for shielding process chamber port | Fangli Hao, Allan K. Ronne | 2010-03-30 |