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MingHang Wu

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #3,056,354 of 4,157,543Top 75%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
9054148 Method for performing hot water seal on electrostatic chuck Hong Shih, Tuochuan Huang, David Schaefer, Ambarish Chhatre, John Daugherty +1 more 2015-06-09