Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9054148 | Method for performing hot water seal on electrostatic chuck | Hong Shih, Tuochuan Huang, David Schaefer, Ambarish Chhatre, John Daugherty +1 more | 2015-06-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9054148 | Method for performing hot water seal on electrostatic chuck | Hong Shih, Tuochuan Huang, David Schaefer, Ambarish Chhatre, John Daugherty +1 more | 2015-06-09 |