Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9314854 | Ductile mode drilling methods for brittle components of plasma processing apparatuses | Lihua Huang, Duane D. Scott, Joseph P. Doench, Emily P. Stenta, Gregory R. Bettencourt +1 more | 2016-04-19 |