Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892920 | Low stress bonding of silicon or germanium parts | Jihong Chen, Robert J. Purtell | 2018-02-13 |
| 9314854 | Ductile mode drilling methods for brittle components of plasma processing apparatuses | Lihua Huang, Duane D. Scott, Jamie Burns, Emily P. Stenta, Gregory R. Bettencourt +1 more | 2016-04-19 |