Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5124216 | Method for monitoring photoresist latent images | Konstantinos P. Giapis, Christian A. Green | 1992-06-23 |
| 5114233 | Method for inspecting etched workpieces | Linda A. Clark, Joseph B. Kruskal, Diane Lambert | 1992-05-19 |
| 5002631 | Plasma etching apparatus and method | Konstantinos P. Giapis, Geoffrey R. Scheller | 1991-03-26 |
| 4902631 | Monitoring the fabrication of semiconductor devices by photon induced electron emission | Stephen W. Downey | 1990-02-20 |