Issued Patents All Time
Showing 26–50 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9947557 | Semiconductor processing system having multiple decoupled plasma sources | John Holland, Peter L. G. Ventzek, Harmeet Singh | 2018-04-17 |
| 9911578 | Small plasma chamber systems and methods | Rajinder Dhindsa, Mukund Srinivasan | 2018-03-06 |
| 9792393 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson | 2017-10-17 |
| 9778561 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Dennis M. Hausmann, Adrien LaVoie, Thomas Knisley +3 more | 2017-10-03 |
| 9449793 | Systems, methods and apparatus for choked flow element extraction | Ali Shajii, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William Robert Entley | 2016-09-20 |
| 9155181 | Distributed multi-zone plasma source systems, methods and apparatus | Ali Shajii, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William Robert Entley | 2015-10-06 |
| 9111729 | Small plasma chamber systems and methods | Rajinder Dhindsa, Mukund Srinivasan | 2015-08-18 |
| 8999104 | Systems, methods and apparatus for separate plasma source control | Ali Shajii, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William Robert Entley | 2015-04-07 |
| 8900403 | Semiconductor processing system having multiple decoupled plasma sources | John Holland, Peter L. G. Ventzek, Harmeet Singh | 2014-12-02 |
| 8900402 | Semiconductor processing system having multiple decoupled plasma sources | John Holland, Peter L. G. Ventzek, Harmeet Singh | 2014-12-02 |
| 7282454 | Switched uniformity control | Robert Steger | 2007-10-16 |
| 7254510 | Smart component-based management techniques in a substrate processing system | Neil Benjamin, Nicolas Bright, Robert Steger | 2007-08-07 |
| RE39534 | Method and apparatus to calibrate a semi-empirical process simulator | David Cooperberg, Vahid Vahedi | 2007-03-27 |
| 7152011 | Smart component-based management techniques in a substrate processing system | Neil Benjamin, Nicolas Bright, Robert Steger | 2006-12-19 |
| 6921724 | Variable temperature processes for tunable electrostatic chuck | Tom A. Kamp, Steve Lee, Chris Lee, Yoko Yamaguchi, Vahid Vahedi +1 more | 2005-07-26 |
| 6632322 | Switched uniformity control | Robert Steger | 2003-10-14 |
| 6301510 | Method and apparatus to calibrate a semi-empirical process simulator | David Cooperberg, Vahid Vahedi | 2001-10-09 |
| 6151532 | Method and apparatus for predicting plasma-process surface profiles | Maria E. Barone, Vahid Vahedi | 2000-11-21 |
| 5976637 | Method for coating heterogeneous substrates with homogeneous layers | Jeffrey Alan Gregus, Po-Yen Lu | 1999-11-02 |
| 5847690 | Integrated liquid crystal display and digitizer having a black matrix layer adapted for sensing screen touch location | Robert A. Boie, Allan R. Kmetz, Richard H. Krukar, Po-Yen Lu, John Robert Morris | 1998-12-08 |
| 5464664 | Downstream ammonia plasma passivation of GaAs | Eray S. Aydil, Konstantinos P. Giapis | 1995-11-07 |
| 5413954 | Method of making a silicon-based device comprising surface plasma cleaning | Eray S. Aydil, Zhen Zhou | 1995-05-09 |
| 5288572 | Method for monitoring photoresist latent images | Konstantinos P. Giapis, Christian A. Green | 1994-02-22 |
| 5277752 | Method for controlling plasma processes | Eray S. Aydil, Jeffrey Alan Gregus, Mark A. Jarnyk | 1994-01-11 |
| 5179029 | Hydrogen plasma passivation of GaAs | Bryan L. Preppernau | 1993-01-12 |