Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6151532 | Method and apparatus for predicting plasma-process surface profiles | Richard A. Gottscho, Vahid Vahedi | 2000-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6151532 | Method and apparatus for predicting plasma-process surface profiles | Richard A. Gottscho, Vahid Vahedi | 2000-11-21 |