Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048325 | Method and apparatus for multilayer photoresist dry development | Vaidyanathan Balasubramaniam, Koichiro Inazawa, Rie Inazawa, Rich Wise, Siddhartha Panda | 2011-11-01 |