Issued Patents All Time
Showing 51–59 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5900062 | Lift pin for dechucking substrates | Hiroji Hanawa, Raymond Gristi, Gerald Yin, Yan Ye | 1999-05-04 |
| 5897712 | Plasma uniformity control for an inductive plasma source | Hiroji Hanawa, Timothy D. Driscoll, Gerald Yin | 1999-04-27 |
| 5817534 | RF plasma reactor with cleaning electrode for cleaning during processing of semiconductor wafers | Yan Ye, Hiroji Hanawa, Diana Xiaobing Ma, Gerald Yin, Donald Olgado +2 more | 1998-10-06 |
| 5801386 | Apparatus for measuring plasma characteristics within a semiconductor wafer processing system and a method of fabricating and using same | Valentin Todorov, Yoshi Tanase, Xue-Yu Qian, Arthur H. Sato, Yan Ye +2 more | 1998-09-01 |
| 5779926 | Plasma process for etching multicomponent alloys | Diana Xiaobing Ma, Daisuke Tajima, Allen Zhao, Timothy Webb | 1998-07-14 |
| 5777289 | RF plasma reactor with hybrid conductor and multi-radius dome ceiling | Hiroji Hanawa, Gerald Yin, Diana Xiaobing Ma, Philip M. Salzman, Allen Zhao | 1998-07-07 |
| 5753044 | RF plasma reactor with hybrid conductor and multi-radius dome ceiling | Hiroji Hanawa, Gerald Yin, Diana Xiabing Ma, Phil Salzman, Allen Zhao | 1998-05-19 |
| 5565681 | Ion energy analyzer with an electrically controlled geometric filter | Gerald Yin | 1996-10-15 |
| 5451784 | Composite diagnostic wafer for semiconductor wafer processing systems | Hiroji Hanawa, Gerald Yin | 1995-09-19 |