Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5801386 | Apparatus for measuring plasma characteristics within a semiconductor wafer processing system and a method of fabricating and using same | Valentin Todorov, Xue-Yu Qian, Arthur H. Sato, Peter Loewenhardt, Yan Ye +2 more | 1998-09-01 |
| 5486975 | Corrosion resistant electrostatic chuck | Shamouil Shamouilian | 1996-01-23 |