Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349606 | Metal hardmask all in one integrated etch | Junwen Huang, Huiyuan Pei, Jiangang Liu, Youngjin Choi, Liang-Tang Wang | 2016-05-24 |
| 8236188 | Method for low-K dielectric etch with reduced damage | Bing Ji, Kenji Takeshita, Andrew D. Bailey, III, Eric A. Hudson, Maryam Moravej +6 more | 2012-08-07 |
| 7461280 | Recall circuit for quitting a power saving mode | Tzu-Huei Lee | 2008-12-02 |
| 6949469 | Methods and apparatus for the optimization of photo resist etching in a plasma processing system | Helen Zhu, Vinay V. Phoray, Hanzhong Xiao, Peter Loewenhardt | 2005-09-27 |
| 6500770 | Method for forming a multi-layer protective coating over porous low-k material | Chen-Hua Yu | 2002-12-31 |