Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7049052 | Method providing an improved bi-layer photoresist pattern | Helen Zhu, Kuo-Lung Tang, S. M. Reza Sadjadi | 2006-05-23 |
| 6949469 | Methods and apparatus for the optimization of photo resist etching in a plasma processing system | Yu-Huei Cheng, Helen Zhu, Vinay V. Phoray, Peter Loewenhardt | 2005-09-27 |