Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9029728 | Methods of and apparatuses for measuring electrical parameters of a plasma process | Randall S. Mundt, Paul MacDonald, Mason L. Freed, Costas J. Spanos | 2015-05-12 |
| 8696417 | Modular exhaust gas header and method of incorporating same in design layout for a manufacturing process machine | Adam L. Tarr, Joseph E. Mastro | 2014-04-15 |
| 8698037 | Methods of and apparatuses for maintenance, diagnosis, and optimization of processes | Randall S. Mundt, Paul MacDonald, Mason L. Freed, Costas J. Spanos | 2014-04-15 |
| 7960670 | Methods of and apparatuses for measuring electrical parameters of a plasma process | Randall S. Mundt, Paul MacDonald, Mason L. Freed, Costas J. Spanos | 2011-06-14 |
| 7482576 | Apparatuses for and methods of monitoring optical radiation parameters for substrate processing operations | Randall S. Mundt, Paul MacDonald, Mason L. Freed, Dean Hunt | 2009-01-27 |