Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9029728 | Methods of and apparatuses for measuring electrical parameters of a plasma process | Randall S. Mundt, Paul MacDonald, Andrew Beers, Costas J. Spanos | 2015-05-12 |
| 8698037 | Methods of and apparatuses for maintenance, diagnosis, and optimization of processes | Randall S. Mundt, Paul MacDonald, Andrew Beers, Costas J. Spanos | 2014-04-15 |
| 8353628 | Method and system for tomographic projection correction | Wenbing Yun, Ying Xu, Frederick W. Duewer, Chao-Chih Hsu | 2013-01-15 |
| 7960670 | Methods of and apparatuses for measuring electrical parameters of a plasma process | Randall S. Mundt, Paul MacDonald, Andrew Beers, Costas J. Spanos | 2011-06-14 |
| 7580767 | Methods of and apparatuses for maintenance, diagnosis, and optimization of processes | Paul MacDonald, Michiel V. P. Krüger, Michael Welch, Costas J. Spanos | 2009-08-25 |
| 7531984 | Sensor apparatus power transfer, communication and maintenance methods and apparatus | Randall S. Mundt, Costas J. Spanos | 2009-05-12 |
| 7482576 | Apparatuses for and methods of monitoring optical radiation parameters for substrate processing operations | Randall S. Mundt, Andrew Beers, Paul MacDonald, Dean Hunt | 2009-01-27 |
| 7299148 | Methods and apparatus for low distortion parameter measurements | Dean Hunt, Costas J. Spanos, Michael Welch, Kameshwar Poolla | 2007-11-20 |
| 7282889 | Maintenance unit for a sensor apparatus | Randall S. Mundt, Costas J. Spanos | 2007-10-16 |
| 6971036 | Methods and apparatus for low power delay control | — | 2005-11-29 |
| 6789034 | Data collection methods and apparatus with parasitic correction | — | 2004-09-07 |
| 6691068 | Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control | Randall S. Mundt, Costas J. Spanos | 2004-02-10 |
| 6671660 | Methods and apparatus for power control | — | 2003-12-30 |