Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7403834 | Methods of and apparatuses for controlling process profiles | Costas J. Spanos | 2008-07-22 |
| 7299148 | Methods and apparatus for low distortion parameter measurements | Dean Hunt, Costas J. Spanos, Michael Welch, Mason L. Freed | 2007-11-20 |
| 7212950 | Methods and apparatus for equipment matching and characterization | — | 2007-05-01 |
| 7016754 | Methods of and apparatus for controlling process profiles | Costas J. Spanos | 2006-03-21 |
| 6907364 | Methods and apparatus for deriving thermal flux data for processing a workpiece | Randall S. Mundt | 2005-06-14 |