| 11424115 |
Multimode configurable spectrometer |
Larry Arlos Bullock, John D. Corless, Richard J. Daignault, Jr., Mark Meloni |
2022-08-23 |
| 10365212 |
System and method for calibration of optical signals in semiconductor process systems |
Andrew Weeks Kueny, Mark Meloni, John D. Corless, Rick Daignault, Sean Lynes |
2019-07-30 |
| 9997325 |
Electron beam exciter for use in chemical analysis in processing systems |
Jimmy W. Hosch, Matthew J. Goeckner, Andrew Weeks Kueny, Kenneth C. Harvey, P.L. Stephan Thamban |
2018-06-12 |
| 9801265 |
High dynamic range measurement system for process monitoring |
Larry Arlos Bullock, John D. Corless, Mark Meloni |
2017-10-24 |
| 9383323 |
Workpiece characterization system |
Mark Meloni, John D. Corless, Andrew Weeks Kueny |
2016-07-05 |
| 9310250 |
High dynamic range measurement system for process monitoring |
Larry Arlos Bullock, John D. Corless, Mark Meloni |
2016-04-12 |
| 8125633 |
Calibration of a radiometric optical monitoring system used for fault detection and process monitoring |
Andrew Weeks Kueny, Kenneth C. Harvey, John D. Corless |
2012-02-28 |
| 6642063 |
Apparatus for characterization of microelectronic feature quality |
Randall S. Mundt, Albert Lamm, Andrew Weeks Kueny |
2003-11-04 |
| 6432729 |
Method for characterization of microelectronic feature quality |
Randall S. Mundt, Albert Lamm, Andrew Weeks Kueny |
2002-08-13 |
| 5816476 |
Dual frequency power supply and transducer |
David Buice, Cesar Alfaro |
1998-10-06 |
| 5595330 |
Power supply |
David Buice, Cesar Alfaro |
1997-01-21 |
| 5364005 |
Ultrasonic transducer and mount |
Paul L. Whelan |
1994-11-15 |