Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997325 | Electron beam exciter for use in chemical analysis in processing systems | Matthew J. Goeckner, Mike Whelan, Andrew Weeks Kueny, Kenneth C. Harvey, P.L. Stephan Thamban | 2018-06-12 |
| 6830939 | System and method for determining endpoint in etch processes using partial least squares discriminant analysis in the time domain of optical emission spectra | Kenneth C. Harvey, Neal B. Gallagher, Barry M. Wise | 2004-12-14 |
| 5422723 | Diffraction gratings for submicron linewidth measurement | Ajit Paranjpe, Phillip Chapados, Jr. | 1995-06-06 |
| 5361137 | Process control for submicron linewidth measurement | Thomas J. Aton, Phillip Chapados, Jr., Ajit Paranjpe | 1994-11-01 |