| 9997325 |
Electron beam exciter for use in chemical analysis in processing systems |
Jimmy W. Hosch, Matthew J. Goeckner, Mike Whelan, Andrew Weeks Kueny, P.L. Stephan Thamban |
2018-06-12 |
| 8125633 |
Calibration of a radiometric optical monitoring system used for fault detection and process monitoring |
Mike Whelan, Andrew Weeks Kueny, John D. Corless |
2012-02-28 |
| 7630859 |
Method and apparatus for reducing the effects of window clouding on a viewport window in a reactive environment |
— |
2009-12-08 |
| 7339682 |
Heterodyne reflectometer for film thickness monitoring and method for implementing |
Arun Ananth Aiyer, Mark Meloni, Andrew Weeks Kueny |
2008-03-04 |
| 6830939 |
System and method for determining endpoint in etch processes using partial least squares discriminant analysis in the time domain of optical emission spectra |
Jimmy W. Hosch, Neal B. Gallagher, Barry M. Wise |
2004-12-14 |
| 6548999 |
RMS power sensor with 84 dB dynamic range |
Vincent Wong, William W. Oldfield |
2003-04-15 |
| 6331769 |
RMS power sensor with 84 dB dynamic range |
Vincent Wong, William W. Oldfield |
2001-12-18 |
| 6326274 |
Method for improving performance and reliability of MOS technologies and data retention characteristics of flash memory cells |
Timothy A. Rost |
2001-12-04 |
| 6291984 |
Dual mode diode power sensor with square law and linear operating regions |
Vincent Wong, Chris Turl, William W. Oldfield |
2001-09-18 |
| 6221705 |
Method for improving performance and reliability of MOS technologies and data retention characteristics of flash memory cells |
Timothy A. Rost |
2001-04-24 |
| 6071751 |
Deuterium sintering with rapid quenching |
Robert M. Wallace |
2000-06-06 |
| 6017806 |
Method to enhance deuterium anneal/implant to reduce channel-hot carrier degradation |
— |
2000-01-25 |
| 4555122 |
Tracking scooter and the like and method of operation |
— |
1985-11-26 |
