Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for characterization of microelectronic feature quality

Method for characterization of microelectronic feature quality

US Patent 6432729 · Granted Aug 13, 2002

Estimated economic value: $3,652,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Fiberoptical cable assemblies and interfaces for spectrometers2025
System, apparatus, and method for improved background correction and calibration2024
Multimode configurable spectrometer2022
System and method for measurement of complex structures2020
System and method for calibration of optical signals in semiconductor process sy2019
System and method for calibration of optical signals in semiconductor process sy2019
Techniques for forming optoelectronic devices2018
Electron beam exciter for use in chemical analysis in processing systems2018
Electron beam exciter for use in chemical analysis in processing systems2018
High dynamic range measurement system for process monitoring2017
Referenced and stabilized optical measurement system2017
Workpiece characterization system2016