Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10545410 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Hakki Ergün Cekli, Masashi Ishibashi, Leon Paul VAN DIJK, Richard Johannes Franciscus Van Haren, Xing Lan Liu +2 more | 2020-01-28 |
| 10324379 | Lithographic apparatus and method | Milenko Jovanovic, Richard Johannes Franciscus Van Haren, Reiner Maria Jungblut, Robertus Wilhelmus Van Der Heijden | 2019-06-18 |
| 7505144 | Copper CMP flatness monitor using grazing incidence interferometry | Dieter Mueller, George Kren | 2009-03-17 |
| 6806966 | Copper CMP flatness monitor using grazing incidence interferometry | Dieter Mueller, George Kren | 2004-10-19 |