Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11669017 | Method for controlling a manufacturing apparatus and associated apparatuses | Roy Werkman, Bijoy Rajasekharan, Lydia Marianna Vergaij-Huizer, Jochem Sebastiaan Wildenberg, Ronald Van Ittersum +3 more | 2023-06-06 |
| 10324379 | Lithographic apparatus and method | Cedric Affentauschegg, Milenko Jovanovic, Richard Johannes Franciscus Van Haren, Reiner Maria Jungblut | 2019-06-18 |
| 8329366 | Apparatus and method for providing resist alignment marks in a double patterning lithographic process | Maya Angelova Doytcheva, Mircea Dusa, Richard Johannes Franciscus Van Haren, Harry Sewell | 2012-12-11 |