Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810619 | Method and system for simultaneous tilt and height control of a substrate surface in an inspection system | Zhongping Cai, Tyler Trytko, Alexander Slobodov, Paul Doyle, Anatoly Romanovsky | 2017-11-07 |
| 9097645 | Method and system for high speed height control of a substrate surface within a wafer inspection system | Zhongping Cai | 2015-08-04 |