Issued Patents All Time
Showing 26–50 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10462391 | Dark-field inspection using a low-noise sensor | Yung-Ho Alex Chuang, David L. Brown, Devis Contarato, John Fielden, Daniel Kavaldjiev +4 more | 2019-10-29 |
| 10234402 | Systems and methods for defect material classification | J. K. Leong, Michael D. Kirk | 2019-03-19 |
| 10228331 | Methods and apparatus for polarized wafer inspection | Sheng Liu | 2019-03-12 |
| 9945792 | Generating an array of spots on inclined surfaces | — | 2018-04-17 |
| 9915622 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll +2 more | 2018-03-13 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev, Christian Wolters +5 more | 2018-02-13 |
| 9886764 | Image acquisition system, image acquisition method, and inspection system | Stanley Stokowski, Andrew V. Hill, Johan De Greeve, Maarten J. van der Burgt, Karel Van Gils | 2018-02-06 |
| 9874526 | Methods and apparatus for polarized wafer inspection | Sheng Liu | 2018-01-23 |
| 9678350 | Laser with integrated multi line or scanning beam capability | Christian Wolters, Jijen Vazhaeparambil, Dirk Woll, Anatoly Romanovsky, Bret Whiteside +1 more | 2017-06-13 |
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Lena Nicolaides, Ben-ming Benjamin Tsai, Prashant Aji, Michael Gasvoda, Stanley Stokowski +5 more | 2017-05-09 |
| 9553034 | Combined semiconductor metrology system | Scott A. Young, Nanchang Zhu, Neeraj Khanna | 2017-01-24 |
| 9291575 | Wafer inspection | Jenn-Kuen Leong, Mehdi Vaez-Iravani | 2016-03-22 |
| 9279774 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll +2 more | 2016-03-08 |
| 9194811 | Apparatus and methods for improving defect detection sensitivity | Sheng Liu | 2015-11-24 |
| 9182358 | Multi-spot defect inspection system | Zhiwei Xu, Christian Wolters, Juergen Reich, Bret Whiteside, Jijen Vazhaeparambil +3 more | 2015-11-10 |
| 9176072 | Dark field inspection system with ring illumination | Mehdi Vaez-Iravani, Scott A. Young, Kris Bhaskar | 2015-11-03 |
| 9086389 | Sample inspection system detector | Daniel Kavaldjiev, Stephen Biellak, Mehdi Vaez-Iravani | 2015-07-21 |
| 9001327 | Composite polarizer with adjustable polarization angles | — | 2015-04-07 |
| 8891079 | Wafer inspection | Jenn-Kuen Leong, Mehdi Vaez-Iravani | 2014-11-18 |
| 8879056 | Multi-spot illumination for wafer inspection | Azmi Kadkly | 2014-11-04 |
| 8817250 | Air bearing for substrate inspection device | Paul Doyle, Alexander Belyaev, J. Rex Runyon, Christian Wolters, Howard Dando +1 more | 2014-08-26 |
| 8604447 | Solar metrology methods and apparatus | Scott A. Young, Ady Levy, Marco Guevremont, Neeraj Khanna | 2013-12-10 |
| 8462329 | Multi-spot illumination for wafer inspection | Azmi Kadkly | 2013-06-11 |
| 8436554 | LED solar illuminator | Ady Levy, Alex Salnik, Mehdi Vaez-Iravani, Lena Nicolaides, Samuel Ngai | 2013-05-07 |
| 8415961 | Measuring sheet resistance and other properties of a semiconductor | Alex Salnik, Lena Nicolaides, Ady Levy | 2013-04-09 |