Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8879056 | Multi-spot illumination for wafer inspection | Guoheng Zhao | 2014-11-04 |
| 8462329 | Multi-spot illumination for wafer inspection | Guoheng Zhao | 2013-06-11 |
| 8223443 | Collection optics | — | 2012-07-17 |
| 7746459 | Systems configured to inspect a wafer | Stephen Biellak, Mehdi Vaez-Iravani | 2010-06-29 |
| 7385688 | Multi-spot illumination and collection optics for highly tilted wafer planes | Mehdi Vaez-Iravani | 2008-06-10 |
| 7345752 | Multi-spot illumination and collection optics for highly tilted wafer planes | Mehdi Vaez-Iravani | 2008-03-18 |