Issued Patents All Time
Showing 76–92 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7079238 | Sample inspection system | Mehdi Vaez-Iravani, Stanley Stokowski | 2006-07-18 |
| 7064821 | Sample inspection system | Mehdi Vaez-Iravani, Stanley Stokowski | 2006-06-20 |
| 7009704 | Overlay error detection | Mehrdad Nikoonahad, Andrei V. Shchegrov, Ben-ming Benjamin Tsai | 2006-03-07 |
| 6891611 | Sample inspection system | Mehdi Vaez-Iravani, Stanley Stokowski | 2005-05-10 |
| 6753528 | System for MEMS inspection and characterization | Mehrdad Nikoonahad | 2004-06-22 |
| 6724473 | Method and system using exposure control to inspect a surface | Jenn-Kuen Leong, Mehdi Vaez-Iravani | 2004-04-20 |
| 6721052 | Systems for measuring periodic structures | Kenneth P. Gross, Rodney Smedt, Mehrdad Nikoonahad | 2004-04-13 |
| 6710876 | Metrology system using optical phase | Mehrdad Nikoonahad, Ian Smith, Mehdi Vaez-Iravani | 2004-03-23 |
| 6707540 | In-situ metalization monitoring using eddy current and optical measurements | Kurt Lehman, Shing Lee, Walter H. Johnson, John Fielden, Mehrdad Nikoonahad | 2004-03-16 |
| 6671051 | Apparatus and methods for detecting killer particles during chemical mechanical polishing | Mehrdad Nikoonahad, Anantha R. Sethuraman | 2003-12-30 |
| 6657715 | Sample inspection system | Mehdi Vaez-Iravani, Stanley Stokowski | 2003-12-02 |
| 6639662 | Sample inspection system | Mehdi Vaez-Iravani, Stanley Stokowski | 2003-10-28 |
| 6628397 | Apparatus and methods for performing self-clearing optical measurements | Mehrdad Nikoonahad, Shing Lee, Kalman Kele, Kurt Lehman | 2003-09-30 |
| 6618134 | Sample inspection system | Mehdi Vaez-Iravani, Stanley Stokowski | 2003-09-09 |
| 6608676 | System for detecting anomalies and/or features of a surface | Stanley Stokowski, Mehdi Vaez-Iravani | 2003-08-19 |
| 6384910 | Sample inspection system | Mehdi Vaez-Iravani, Stanley Stokowski | 2002-05-07 |
| 6201601 | Sample inspection system | Mehdi Vaez-Iravani, Stanley Stokowski | 2001-03-13 |