Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7743728 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Jay D. Pinson, II, Michael R. Rice +10 more | 2010-06-29 |
| 7699021 | Cluster tool substrate throughput optimization | Tetsuya Ishikawa | 2010-04-20 |
| 7694647 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Jay D. Pinson, II, Michael R. Rice +10 more | 2010-04-13 |
| 7357842 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Jay D. Pinson, II, Michael R. Rice +10 more | 2008-04-15 |
| 6454332 | Apparatus and methods for handling a substrate | Boris Govzman, Konstantin Volodarsky | 2002-09-24 |
| 5871390 | Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing | Anil K. Pant, Douglas W. Young, Joseph R. Breivogel, Konstantin Volodarski | 1999-02-16 |