Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5871390 | Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing | Anil K. Pant, Douglas W. Young, Joseph R. Breivogel, Leon Volfovski | 1999-02-16 |