Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer edge ring lifting solution

Wafer edge ring lifting solution

US Patent 12094752 · Granted Sep 17, 2024

Estimated economic value: $46,375,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Determining equipment constant updates by machine learning2025
Chamber matching by equipment constant updates2025
Atomic layer deposition coating system for inner walls of gas lines2025
Plasma processing chambers configured for tunable substrate and edge sheath cont2025
Methods of operating a spatial deposition tool2025
Cooling base for a substrate support2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Atomic layer deposition coatings for high temperature ceramic components2025
Lift pin assembly2025
Mainframe of dual-robot substrate processing system2025