Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › In-situ apparatus for semiconductor process module

In-situ apparatus for semiconductor process module

US Patent 11075105 · Granted Jul 27, 2021

Estimated economic value: $132,720,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Determining equipment constant updates by machine learning2025
Chamber matching by equipment constant updates2025
Substrate processing system carrier2025
Cooling base for a substrate support2025
Electrical connector for cooled substrate support assembly2025
Electrical connector for cooled substrate support assembly2025
Lift pin assembly2025
Apparatus and method for controlling edge ring variation2025
Substrate carrier with array of independently controllable heater elements2025
Condition selectable backside gas2025
Oil-cooled exhaust turbine apparatus2025
Cooled substrate support assembly for radio frequency environments2025