Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373893 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty, Andreas Schmid, Andrew Antoine NOUJAIM | 2022-06-28 |
| 7982187 | Method and apparatus for photon-assisted evaluation of a plasma | — | 2011-07-19 |