Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate support assembly with arc resistant coolant conduit

Substrate support assembly with arc resistant coolant conduit

US Patent 11646183 · Granted May 9, 2023

Estimated economic value: $42,400,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing system carrier2025
Electrical connector for cooled substrate support assembly2025
Electrical connector for cooled substrate support assembly2025
Electrical connector for cooled substrate support assembly2025
Electrical connector for cooled substrate support assembly2025
Apparatus and method for controlling edge ring variation2025
Condition selectable backside gas2025
Condition selectable backside gas2025
Oil-cooled exhaust turbine apparatus2025
Cooled substrate support assembly for radio frequency environments2025
Cooled substrate support assembly for radio frequency environments2025
Cooled substrate support assembly for radio frequency environments2025