Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8302884 | Apparatus and method of effective fluid injection and vaporization for chemical vapor deposition application | Alex E. Spencer | 2012-11-06 |
| 6561796 | Method of semiconductor wafer heating to prevent bowing | George D. Kamian, Edward J. McInerney, Craig L. Stevens | 2003-05-13 |