Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6397861 | Situ plasma clean gas injection | Edward J. McInerney | 2002-06-04 |
| 6281144 | Exclusion of polymer film from semiconductor wafer edge and backside during film (CVD) deposition | Thomas J. Cleary | 2001-08-28 |
| 6277235 | In situ plasma clean gas injection | Edward J. McInerney | 2001-08-21 |
| 6063202 | Apparatus for backside and edge exclusion of polymer film during chemical vapor deposition | Thomas J. Cleary | 2000-05-16 |
| 6021582 | Temperature control of parylene dimer | — | 2000-02-08 |
| 5810933 | Wafer cooling device | Thomas W. Mountsier | 1998-09-22 |