| 9484251 |
Contact integration for reduced interface and series contact resistance |
Paul R. Besser, Sanjay Gopinath |
2016-11-01 |
| 7968436 |
Low-K SiC copper diffusion barrier films |
Yongsik Yu, Karen Billington, Xingyuan Tang, Haiying Fu, Michael Carris |
2011-06-28 |
| 7851232 |
UV treatment for carbon-containing low-k dielectric repair in semiconductor processing |
Bart J. van Schravendijk |
2010-12-14 |
| 7842604 |
Low-k b-doped SiC copper diffusion barrier films |
Yongsik Yu, Atul Gupta, Karen Billington, Michael Carris, Thomas W. Mountsier |
2010-11-30 |
| 7573061 |
Low-k SiC copper diffusion barrier films |
Yongsik Yu, Karen Billington, Xingyuan Tang, Haiying Fu, Michael Carris |
2009-08-11 |
| 7420275 |
Boron-doped SIC copper diffusion barrier films |
Yongsik Yu, Atul Gupta, Karen Billington, Michael Carris, Thomas W. Mountsier |
2008-09-02 |
| 7282438 |
Low-k SiC copper diffusion barrier films |
Yongsik Yu, Karen Billington, Xingyuan Tang, Haiying Fu, Michael Carris |
2007-10-16 |
| 7239017 |
Low-k B-doped SiC copper diffusion barrier films |
Yongsik Yu, Atul Gupta, Karen Billington, Michael Carris, Thomas W. Mountsier |
2007-07-03 |
| 7163889 |
Film for copper diffusion barrier |
Yongsik Yu, Karen Billington, Robert Hepburn, Michael Carris |
2007-01-16 |
| 7041543 |
Strained transistor architecture and method |
Bhadri N. Varadarajan, James S. Sims |
2006-05-09 |
| 6967405 |
Film for copper diffusion barrier |
Yongsik Yu, Karen Billington, Robert Hepburn, Michael Carris |
2005-11-22 |
