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Plasma activated conformal dielectric film deposition |
Shankar Swaminathan, Jon Henri, Dennis M. Hausmann, Pramod Subramonium, Mandyam Sriram +3 more |
2018-08-07 |
| 9570274 |
Plasma activated conformal dielectric film deposition |
Shankar Swaminathan, Jon Henri, Dennis M. Hausmann, Pramod Subramonium, Mandyam Sriram +3 more |
2017-02-14 |
| 8999859 |
Plasma activated conformal dielectric film deposition |
Shankar Swaminathan, Jon Henri, Dennis M. Hausmann, Pramod Subramonium, Mandyam Sriram +3 more |
2015-04-07 |
| 8846525 |
Hardmask materials |
George Andrew Antonelli, Ananda Banerji, Bart J. van Schravendijk |
2014-09-30 |
| 8637411 |
Plasma activated conformal dielectric film deposition |
Shankar Swaminathan, Jon Henri, Dennis M. Hausmann, Pramod Subramonium, Mandyam Sriram +3 more |
2014-01-28 |
| 8536073 |
Hardmask materials |
George Andrew Antonelli, Ananda Banerji, Bart J. van Schravendijk |
2013-09-17 |
| 8479683 |
Apparatus including a plasma chamber and controller including instructions for forming a boron nitride layer |
George Andrew Antonelli, Mandyam Sriram, Pramod Subramonium |
2013-07-09 |
| 8288292 |
Depositing conformal boron nitride film by CVD without plasma |
George Andrew Antonelli, Mandyam Sriram, Pramod Subramonium |
2012-10-16 |
| 8247332 |
Hardmask materials |
George Andrew Antonelli, Ananda Banerji, Bart J. van Schravendijk |
2012-08-21 |
| 8217513 |
Remote plasma processing of interface surfaces |
George Andrew Antonelli, Jennifer O'Loughlin, Tony Xavier, Mandyam Sriram, Bart J. van Schravendijk +2 more |
2012-07-10 |
| 8178443 |
Hardmask materials |
George Andrew Antonelli, Bart J. van Schravendijk |
2012-05-15 |
| 8084339 |
Remote plasma processing of interface surfaces |
George Andrew Antonelli, Jennifer O'Loughlin, Tony Xavier, Mandyam Sriram, Bart J. van Schravendijk +2 more |
2011-12-27 |