Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322641 | Mechanical indexer for multi-station process module | Karl Leeser, Richard M. Blank, Robert Sculac, Damien Slevin | 2025-06-03 |
| 12272583 | Reduced footprint wafer handling platform | Christopher W. Burkhart, Richard H. Gould, Candi Kristoffersen, Richard M. Blank, Hironobu Yasuumi | 2025-04-08 |
| 11024531 | Optimized low energy / high productivity deposition system | Karl Leeser, Richard M. Blank, Robert Sculac | 2021-06-01 |
| 8920162 | Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation | Chris Gage, Shawn M. Hamilton, Sheldon Templeton | 2014-12-30 |
| 8273670 | Load lock design for rapid wafer heating | Michael Rivkin, Ron Powell, Shawn M. Hamilton | 2012-09-25 |
| 8052419 | Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation | Chris Gage, Shawn M. Hamilton, Sheldon Templeton | 2011-11-08 |
| 7960297 | Load lock design for rapid wafer heating | Michael Rivkin, Ron Powell, Shawn M. Hamilton | 2011-06-14 |