Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322641 | Mechanical indexer for multi-station process module | Michael Nordin, Karl Leeser, Richard M. Blank, Damien Slevin | 2025-06-03 |
| 11024531 | Optimized low energy / high productivity deposition system | Michael Nordin, Karl Leeser, Richard M. Blank | 2021-06-01 |
| 9097388 | Effluent management, waste dilution, effluent pre-dilution, acid waste handling | Sandeep Mariserla, Brian Foster, Aaron Francis, Gregory Lim, Jeffrey Chih-Hou Lowe | 2015-08-04 |
| 8893923 | Methods and systems for dispensing different liquids for high productivity combinatorial processing | Satbir Kahlon, Aaron Francis, Chi-I Lang, Gregory Lim, Jeffrey Chih-Hou Lowe | 2014-11-25 |
| 8835329 | Reactor cell isolation using differential pressure in a combinatorial reactor | Sandeep Mariserla, Aaron Francis, Jeffrey Chih-Hou Lowe | 2014-09-16 |
| 8807550 | Method and apparatus for controlling force between reactor and substrate | Jeffrey Chih-Hou Lowe, Sandeep Mariserla | 2014-08-19 |
| 8663397 | Processing and cleaning substrates | Satbir Kahlon, Jeffrey Chih-Hou Lowe, Frank C. Ma, Sandeep Mariserla | 2014-03-04 |
| 7955990 | Method for improved thickness repeatability of PECVD deposited carbon films | Jon Henri, Gishun Hsu, Scott Stoddard | 2011-06-07 |