| 12322641 |
Mechanical indexer for multi-station process module |
Michael Nordin, Karl Leeser, Richard M. Blank, Damien Slevin |
2025-06-03 |
| 11024531 |
Optimized low energy / high productivity deposition system |
Michael Nordin, Karl Leeser, Richard M. Blank |
2021-06-01 |
| 9097388 |
Effluent management, waste dilution, effluent pre-dilution, acid waste handling |
Sandeep Mariserla, Brian Foster, Aaron Francis, Gregory Lim, Jeffrey Chih-Hou Lowe |
2015-08-04 |
| 8893923 |
Methods and systems for dispensing different liquids for high productivity combinatorial processing |
Satbir Kahlon, Aaron Francis, Chi-I Lang, Gregory Lim, Jeffrey Chih-Hou Lowe |
2014-11-25 |
| 8835329 |
Reactor cell isolation using differential pressure in a combinatorial reactor |
Sandeep Mariserla, Aaron Francis, Jeffrey Chih-Hou Lowe |
2014-09-16 |
| 8807550 |
Method and apparatus for controlling force between reactor and substrate |
Jeffrey Chih-Hou Lowe, Sandeep Mariserla |
2014-08-19 |
| 8663397 |
Processing and cleaning substrates |
Satbir Kahlon, Jeffrey Chih-Hou Lowe, Frank C. Ma, Sandeep Mariserla |
2014-03-04 |
| 7955990 |
Method for improved thickness repeatability of PECVD deposited carbon films |
Jon Henri, Gishun Hsu, Scott Stoddard |
2011-06-07 |
