Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optimized low energy / high productivity deposition system

Optimized low energy / high productivity deposition system

US Patent 11024531 · Granted Jun 1, 2021

Estimated economic value: $264,749,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Process module chamber providing symmetric RF return path2025
Multiple-output radiofrequency matching module and associated methods2025
Impedance transformation in radio-frequency-assisted plasma generation2025
Common terminal heater for ceramic pedestals used in semiconductor for fabricati2025
In situ protective coating of chamber components for semiconductor processing2025
Lamellar ceramic structure2025
Integrated adaptive positioning systems and routines for automated wafer-handlin2025
Anomalous plasma event detection and mitigation in semiconductor processing2025
Mechanical indexer for multi-station process module2025
Mechanical indexer for multi-station process module2025
Mechanical indexer for multi-station process module2025
Mechanical indexer for multi-station process module2025