Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9223319 | High dilution ratio by successively preparing and diluting chemicals | Jeffrey Chih-Hou Lowe, Wen Yu | 2015-12-29 |
| 9076674 | Method and apparatus for improving particle performance | — | 2015-07-07 |
| 9016289 | System and method for reducing particles and marks on wafer surface following reactor processing | Glen Egami | 2015-04-28 |
| 8893923 | Methods and systems for dispensing different liquids for high productivity combinatorial processing | Aaron Francis, Chi-I Lang, Gregory Lim, Jeffrey Chih-Hou Lowe, Robert Sculac | 2014-11-25 |
| 8663397 | Processing and cleaning substrates | Jeffrey Chih-Hou Lowe, Frank C. Ma, Sandeep Mariserla, Robert Sculac | 2014-03-04 |
| 8647446 | Method and system for improving performance and preventing corrosion in multi-module cleaning chamber | Frank C. Ma | 2014-02-11 |