Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9177849 | Chuck for mounting a semiconductor wafer for liquid immersion processing | Rajesh Kelekar, Aaron Francis | 2015-11-03 |
| 9016289 | System and method for reducing particles and marks on wafer surface following reactor processing | Satbir Kahlon | 2015-04-28 |