Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Workpiece support with fluid zones for temperature control

Workpiece support with fluid zones for temperature control

US Patent 7972444 · Granted Jul 5, 2011

Estimated economic value: $1,692,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma source for semiconductor processing2025
Addressable plasma delivery methods and devices2025
Plasma sources and plasma processing apparatus thereof2025
Film thickness uniformity improvement using edge ring and bias electrode geometr2025
Uniformity control for plasma processing2025
Digital control of plasma processing2024
Edge ring2024
Image-based digital control of plasma processing2024
Plasma processing with independent temperature control2023
Plasma sources and plasma processing apparatus thereof2023
End effectors for moving workpieces and replaceable parts within a system for pr2022
Focus ring adjustment assembly of a system for processing workpieces under vacuu2022